SJ series

Large-sized glass substrate transfer robot.

Large-sized glass substrate transfer robot

  • Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.

Fastest motion in its class

  • Rotation speed: Maximum 180°/sec
  • Up and down speed: Maximum 1,050 mm/sec

Unique linkage structure applied to up and down axis

  • High-rigidity structure for minimizing flexure and vibration
  • Belt-less structure ensures high reliability and safety

Moving cables are completely enclosed in the arm

  • The enclosed design prevents particle generation and looks good too