Large-sized glass substrate transfer robot
- Perfect for horizontal transfer of 7th generation (SJ80C) through 9th generation (SJ120C) and other various-sized glass substrates.
Fastest motion in its class
- Rotation speed: Maximum 180°/sec
- Up and down speed: Maximum 1,050 mm/sec
Unique linkage structure applied to up and down axis
- High-rigidity structure for minimizing flexure and vibration
- Belt-less structure ensures high reliability and safety
Moving cables are completely enclosed in the arm
- The enclosed design prevents particle generation and looks good too
