TM5
|
TM5 |
| Product Name |
TM5-700 |
TM5M-700 |
TM5M-700 SEMI |
| Part Number |
RT6-000700[] |
RT6-010700[] |
RT6-010701[] |
| Weight (kg) |
22.1 |
| Controller Weight (kg) |
13.5 |
14.5 |
14.5 |
| Max Payload (kg) |
6 |
| Reach (mm) |
700 |
| Mounting |
Wall, Table, Ceiling |
| Typical Speed (m/s) |
1.1 |
| Joint Range |
Joint 1 |
±270° |
| Joint 2, 4, 5 |
±180° |
| Joint 3 |
±155° |
| Joint 6 |
±270° |
| Joint Speeds |
Joint 1, 2, 3 |
180°/s |
| Joint 4, 5, 6 |
225°/s |
| Repeatability (mm) |
±0.05 |
| IP |
IP54 (robot arm), IP32 (control box), IP40 (robot stick) |
| Cleanroom Class |
ISO Class 5 |
| Operating temperature and humidity |
0 to 55°C, 85% max. (with no condensation) |
| Storage temperature and humidity |
-20 to 60°C, 85% max. (with no condensation) |
| Operating and storage atmosphere |
No corrosive gases |
| Power Supply |
100-240 VAC, 50-60 Hz |
22-60 VDC |
22-60 VDC |
| Robot Arm Cable Length |
3m/12m |
1.5m |
1.5m |
| I/O Ports |
Control Box |
Digital In: 16
Digital Out: 16
Analog In: 2
Analog Out: 1 |
| Tool |
Digital In: 4
Digital Out: 4
Analog In: 1
Analog Out: 0 |
| I/O Interface |
3 X COM, 1 X HDMI, 3 X LAN, 4 X USB2.0, 2 X USB3.0 |
| Communication |
RS232, Ethernet (master), Modbus TCP/RTU (master & slave) |
| Integrated Camera |
5M pixels, color |
5M pixels, color |
5M pixels, color |
| I/O Power Supply |
24V 1.5A (control box and tool) |
| Programming Environment |
TMflow, flowchart based |
| SEMI S2 Certified* |
No |
No |
Yes |
|
TM5 |
| Product Name |
TM5-900 |
TM5M-900 |
TM5M-900 SEMI |
| Part Number |
RT6-000900[] |
RT6-010900[] |
RT6-010901[] |
| Weight (kg) |
22.6 |
| Controller Weight (kg) |
13.5 |
14.5 |
14.5 |
| Max Payload (kg) |
4 |
| Reach (mm) |
900 |
| Mounting |
Wall, Table, Ceiling |
| Typical Speed (m/s) |
1.4 |
| Joint Range |
Joint 1 |
±270° |
| Joint 2, 4, 5 |
±180° |
| Joint 3 |
±155° |
| Joint 6 |
±270° |
| Joint Speeds |
Joint 1, 2, 3 |
180°/s |
| Joint 4, 5, 6 |
225°/s |
| Repeatability (mm) |
±0.05 |
| IP |
IP54 (robot arm), IP32 (control box), IP40 (robot stick) |
| Cleanroom Class |
ISO Class 5 |
| Operating temperature and humidity |
0 to 55°C, 85% max. (with no condensation) |
| Storage temperature and humidity |
-20 to 60°C, 85% max. (with no condensation) |
| Operating and storage atmosphere |
No corrosive gases |
| Power Supply |
100-240 VAC, 50-60 Hz |
22-60 VDC |
22-60 VDC |
| Robot Arm Cable Length |
3m/12m |
1.5m |
1.5m |
| I/O Ports |
Control Box |
Digital In: 16
Digital Out: 16
Analog In: 2
Analog Out: 1 |
| Tool |
Digital In: 4
Digital Out: 4
Analog In: 1
Analog Out: 0 |
| I/O Interface |
3 X COM, 1 X HDMI, 3 X LAN, 4 X USB2.0, 2 X USB3.0 |
| Communication |
RS232, Ethernet (master), Modbus TCP/RTU (master & slave) |
| Integrated Camera |
5M pixels, color |
5M pixels, color |
5M pixels, color |
| I/O Power Supply |
24V 1.5A (control box and tool) |
| Programming Environment |
TMflow, flowchart based |
| SEMI S2 Certified* |
No |
No |
Yes |
* SEMI safety SEMI safety guidelines are issued by an industry association with the same name: SEMI (Semiconductor
Equipment and Materials International), which is the central global network of manufacturers of micro- and nano-
electronics industries.
* SEMI S2 is the most well-known standard in semiconductor manufacturing equipment for Environmental, Health, and
Safety (EHS).
TM12/14
|
TM12 |
| Product Name |
TM12 |
TM12M |
TM12M SEMI |
| Part Number |
RT6-100130[] |
RT6-110130[] |
RT6-110131[] |
| Weight (kg) |
33.3 |
| Controller Weight (kg) |
13.8 |
14.5 |
14.5 |
| Max Payload (kg) |
12 |
| Reach (mm) |
1300 |
| Mounting |
Wall, Table, Ceiling |
| Typical Speed (m/s) |
1.3 |
| Joint Range |
Joint 1 |
±270° |
| Joint 2, 4, 5 |
±180° |
| Joint 3 |
±166° |
| Joint 6 |
±270° |
| Joint Speeds |
Joint 1, 2 |
120°/s |
| Joint 3 |
180°/s |
| Joint 4, 5 |
180°/s |
| Joint 6 |
180°/s |
| Repeatability (mm) |
±0.1 |
| IP |
IP54 (robot arm), IP32 (control box), IP40 (robot stick) |
| Cleanroom Class |
ISO Class 5 |
| Operating temperature and humidity |
0 to 55°C, 85% max. (with no condensation) |
| Storage temperature and humidity |
-20 to 60°C, 85% max. (with no condensation) |
| Operating and storage atmosphere |
No corrosive gases |
| Power Supply |
100-240 VAC, 50-60 Hz |
22-60 VDC |
22-60 VDC |
| Robot Arm Cable Length |
3m/12m |
1.5m |
1.5m |
| I/O Ports |
Control Box |
Digital In: 16
Digital Out: 16
Analog In: 2
Analog Out: 1 |
| Tool |
Digital In: 4
Digital Out: 4
Analog In: 1
Analog Out: 0 |
| I/O Interface |
3 X COM, 1 X HDMI, 3 X LAN, 4 X USB2.0, 2 X USB3.0 |
| Communication |
RS232, Ethernet(master), Modbus TCP/RTU (master & slave) |
| Integrated Camera |
5M pixels, color |
5M pixels, color |
5M pixels, color |
| I/O Power Supply |
24V 1.5A (control box and tool) |
| Programming Environment |
TMflow, flowchart based |
| SEMI S2 Certified* |
No |
No |
Yes |
|
TM14 |
| Product Name |
TM14 |
TM14M |
TM14M SEMI |
| Part Number |
RT6-200110[] |
RT6-210110[] |
RT6-210111[] |
| Weight (kg) |
32.6 |
| Controller Weight (kg) |
13.8 |
14.5 |
14.5 |
| Max Payload (kg) |
14 |
| Reach (mm) |
1100 |
| Mounting |
Wall, Table, Ceiling |
| Typical Speed (m/s) |
1.1 |
| Joint Range |
Joint 1 |
±270° |
| Joint 2, 4, 5 |
±180° |
| Joint 3 |
±163° |
| Joint 6 |
±270° |
| Joint Speeds |
Joint 1, 2 |
120°/s |
| Joint 3 |
180°/s |
| Joint 4, 5 |
150°/s |
| Joint 6 |
180°/s |
| Repeatability (mm) |
±0.1 |
| IP |
IP54 (robot arm), IP32 (control box), IP40 (robot stick) |
| Cleanroom Class |
ISO Class 5 |
| Operating temperature and humidity |
0 to 55°C, 85% max. (with no condensation) |
| Storage temperature and humidity |
-20 to 60°C, 85% max. (with no condensation) |
| Operating and storage atmosphere |
No corrosive gases |
| Power Supply |
100-240 VAC, 50-60 Hz |
22-60 VDC |
22-60 VDC |
| Robot Arm Cable Length |
3m/12m |
1.5m |
1.5m |
| I/O Ports |
Control Box |
Digital In: 16
Digital Out: 16
Analog In: 2
Analog Out: 1 |
| Tool |
Digital In: 4
Digital Out: 4
Analog In: 1
Analog Out: 0 |
| I/O Interface |
3 X COM, 1 X HDMI, 3 X LAN, 4 X USB2.0, 2 X USB3.0 |
| Communication |
RS232, Ethernet(master), Modbus TCP/RTU (master & slave) |
| Integrated Camera |
5M pixels, color |
5M pixels, color |
5M pixels, color |
| I/O Power Supply |
24V 1.5A (control box and tool) |
| Programming Environment |
TMflow, flowchart based |
| SEMI S2 Certified* |
No |
No |
Yes |
* SEMI safety SEMI safety guidelines are issued by an industry association with the same name: SEMI (Semiconductor
Equipment and Materials International), which is the central global network of manufacturers of micro- and nano-
electronics industries.
SEMI S2 is the most well-known standard in semiconductor manufacturing equipment for Environmental, Health, and
Safety (EHS).
